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Article Dans Une Revue Journal of Materials Science: Materials in Electronics Année : 2016

Lithium cobalt oxide crystallization on flexible polyimide substrate

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Résumé

This work reports the fabrication and characterization of lithium cobalt oxide films (LiCoO$_2$) on flexible Kapton$^R$ substrate. LiCoO$_2$ is commonly used as cathode of lithium microbatteries but needs an annealing of 700°C, which is not compatible with most flexible substrates. LiCoO$_2$ films were deposited by reactive RF sputtering followed by an annealing process at 400 °C for 1 h in vacuum and air atmospheres both in silicon and Kapton$^R$ substrates. Raman spectroscopy, X-ray diffraction patterns and scanning electron microscopy images were used to evaluate samples crystallinity and morphology. Films fabricated in Kapton$^R$ and silicon substrates were compared.

Domaines

Chimie Matériaux
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Dates et versions

hal-03611069 , version 1 (16-03-2022)

Identifiants

Citer

J. F. Ribeiro, R. Sousa, E. M. F. Vieira, A. G. Rolo, M. M. Silva, et al.. Lithium cobalt oxide crystallization on flexible polyimide substrate. Journal of Materials Science: Materials in Electronics, 2016, 27, pp.631-636. ⟨10.1007/s10854-015-3798-1⟩. ⟨hal-03611069⟩
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