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Lithium cobalt oxide crystallization on flexible polyimide substrate

Abstract : This work reports the fabrication and characterization of lithium cobalt oxide films (LiCoO$_2$) on flexible Kapton$^R$ substrate. LiCoO$_2$ is commonly used as cathode of lithium microbatteries but needs an annealing of 700°C, which is not compatible with most flexible substrates. LiCoO$_2$ films were deposited by reactive RF sputtering followed by an annealing process at 400 °C for 1 h in vacuum and air atmospheres both in silicon and Kapton$^R$ substrates. Raman spectroscopy, X-ray diffraction patterns and scanning electron microscopy images were used to evaluate samples crystallinity and morphology. Films fabricated in Kapton$^R$ and silicon substrates were compared.
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Contributeur : Louise DESSAIVRE Connectez-vous pour contacter le contributeur
Soumis le : mercredi 16 mars 2022 - 18:33:00
Dernière modification le : vendredi 5 août 2022 - 11:24:45




J. F. Ribeiro, R. Sousa, E. M. F. Vieira, A. G. Rolo, M. M. Silva, et al.. Lithium cobalt oxide crystallization on flexible polyimide substrate. Journal of Materials Science: Materials in Electronics, Springer Verlag, 2016, 27, pp.631-636. ⟨10.1007/s10854-015-3798-1⟩. ⟨hal-03611069⟩



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